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Evaluating Micromechanical Properties at Surfaces Using Nanoindentation with Finite-Element Modeling

Radiation Solid Interactions and Processing Department, Sandia National Laboratories, Albuquerque, NM 87185-1056, USA

D. M. Follstaedt

Radiation Solid Interactions and Processing Department, Sandia National Laboratories, Albuquerque, NM 87185-1056, USA

S. M. Myers

Radiation Solid Interactions and Processing Department, Sandia National Laboratories, Albuquerque, NM 87185-1056, USA

Detailed finite-element modeling of nanoindentation data is used to obtain accurate mechanical properties of very thin films or surface-modified layers independently of the properties of the underlying substrates. These procedures accurately deduce the yield strength, elastic modulus, and layer hardness, and greatly increase the usefulness of indentation testing with very thin surface layers. Moreover, extraction of the effective Young's modulus in the near surface region should enable mechanical damage studies on a small scale. This paper presents a brief overview of the procedures involved and illustrates them with He-implanted Ni.

Key Words: nanoindentation • mechanical properties • finite-element modeling

International Journal of Damage Mechanics, Vol. 12, No. 4, 377-387 (2003)
DOI: 10.1177/105678903036228


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